1. Select the most proper Litho materials for advanced Litho process setup, including photo resist, BARC, underlay materials like SOC etc.
2. Set up track process conditions of advanced Litho processes, including baking conditions, developing conditions and WEE settings
3. Generate and implement exposure SMO and other scanner functions for CD and OVL control.
4. Characterize Litho process capability for OPC and DTCO.
5. Set up and optimize Litho frame cell design.
6. Set up Litho process CD and OVL metrologies for production inline monitor.

1. With Master or Doctor degree of Science and Engineering. Background in optics is also preferred.
2. At least 8 years’ experiences in 12 inch wafer fabs and at least 2 years’ FinFet process development and maintenance experiences. Over 1 year EUV experience should be the best justification for the offers.

上班地址：张江路18号